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Journal Articles

XPS and XANES observations on non-stoichiometric SiN$$_{x}$$ produced by low-energy ion implantation

Ali, M.; Baba, Yuji; Sekiguchi, Tetsuhiro; Li, Y.; Yamamoto, Hiroyuki

Photon Factory Activity Report 1998, P. 36, 1999/11

http://ccdb5fs.kek.jp/cgi-bin/img/tiff2gif?199923003+00066

no abstracts in English

JAEA Reports

Data Compilation for Depth Distribution of Ion-Induced Damage and Ion-Implanted Atoms

*; *; Ozawa, K.

JAERI-M 84-092, 144 Pages, 1984/05

JAERI-M-84-092.pdf:2.61MB

no abstracts in English

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